Ultra-Low-Profile Z-Tip-Tilt Nanopositioning Stage Provides Frictionless Motion
Solution for Precision Alignment and Assembly, new from PI
PI, a global leader in motion control and nanopositioning systems, offers an ultra-low-profile Z-Tip-Tilt stage designed for demanding alignment applications in optics, semiconductors, precision assembly, and photonics.
Based on air bearings and linear motors, the stage is wear-free, maintenance-free, and cleanroom compatible.
High Speed, Resolution, and Load Capacity
High speed is ensured by 3-phase linear motors, while high resolution and precision are provided by closed-loop operation with linear encoders (1 nm resolution) for direct position feedback. The direct-drive design, free of drive screws and gears, enables high dynamics with acceleration up to 1g, high speed, and outstanding positional repeatability with zero backlash. The 10-inch diameter platform supports a high load capacity of 18 lbs. The compact design provides 5 mm of Z-travel and a rotation range of 2° for tilt axes.
Low Profile Enabled by Parallel-Kinematics Design
The parallel-kinematics, integrated design with only one moving platform significantly reduces height, center of gravity, and inertia — ideal for high-dynamic applications. The single-platform design also eliminates the accumulation of errors commonly seen in Z-Tip-Tilt systems based on three individual modules.
5-Axis and 6-Axis Combinations
The A-523 Z-Tip-Tilt stage can be paired with a 2-axis planar air-bearing stage to provide 5-axis precision motion for semiconductor and laser processing automation. A 6DOF combination with the low-profile A-361 XYθz stage is also available.
Video: Example of a 5-Axis high-precision stage based on the A-523 Z-Tip-Tilt and the A-311 planar XY stage
More information on the Z-Tip-Tilt nanopositioning stage: A-523 PIglide High-Precision Z-Tip-Tilt Stage with Air Bearings
Applications
The A-523 three-axis air-bearing stage is ideal for high-precision alignment automation tasks, such as optics testing and positioning, wafer inspection, fiber positioning, flat-screen inspection, lens alignment, maskless lithography, and µ-LED manufacturing.
Industries Served
Optics, Photonics, Semiconductors, Precision Assembly, Automation
PI Americas
https://www.pi-usa.us | info@pi-usa.us | (508) 832-3456
Applications Blog | Videos | X | LinkedIn
Featured Product
MOTION CONTROLLERS FOR MINIATURE DRIVES AND MICRODRIVES
FAULHABER has added another extremely compact Motion Controller without housing to its product range. The new Motion Controller is ideal for integration in equipment manufacturing and medical technology applications. With 36 V and 3 A (peak current 9 A), it covers the power range up to approx. 100 W and is suitable for DC-motors with encoder, brushless drives or linear motors.
